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EMS TURBO SPUTTER PDF

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The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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Supplied with a pack of 10 tungsten filaments B and a molybdenum Mo boat. Alternatively, the process can be sptuter by time. However, this is not suitable for electron microscopy applications because it will heat the sample turbk can result in damage when the plasma interacts with the sample.

For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own. The advance design of sputtering head, power supply and system control allows sputtering of both oxidizing and non-oxidizing noble metals for thin film applications and for scanning electron microscopy SEM coating. Targets available from Quorum. Utrbo the operational heart of the EMS T ES is a color touch screen which allows users to rapidly enter and store their own process data.

Includes gear box for increased coating sputrer coverage. Rotation speed is variable between preset limits. Turbp unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump.

Tilt and height can be pre-set. For coatings with a fine grain structure iridium Ir can also be used. Full graphical interface with touch screen buttons, includes features such as a log of the last coatings and reminders for when maintenance is due. A swinging arm stage drive is supplied as standard, which is a stage drive and positioning mechanism that positions the stage under the correct target.

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For increased source to specimen distance and for coating large specimens.

Carbon Coaters, Sputter Coaters and Turbo Coaters

Rotating specimen stage, 50 mm diameter, supplied as standard. Typically ultimate vacuums of around 5 x 10 -5 mbar can be expected in a clean system after pre-pumping with dry nitrogen gas.

Uses 57 mm diameter disc targets – still available from Quorum. High resolution turbomolecular pumped capacitive touch-screen controled sputter coater with status LED indicatorincluding quick release sputter insert and one TK 57mm diameter x 0. Borosilicate Glass mm Dia. Other stages available on request. Aluminum Al rapidly forms an oxide layer which can be difficult to remove.

Dry pumping alternatives are also available. Toggle navigation Quorum Technologies. Intelligent system sptuter automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

E Automatic Sputter Coater. This allows the user to configure the system as a sputter coater, evaporator or glow discharge system — all in one space saving format. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

E ‘Cool’ Sputter Coater. The touch screen rms features maintenance prompts that highlight time of last clean, spjtter time since last cleaned, system ‘on time’ and time of last service.

Pioneering annular head sputter sputfer developed by Polaron. The EMS T D Plus has two independent sputtering heads to allow sequential sputtering of two different metals without the need to ‘break’ vacuum, for example, a thin ‘seeding’ layer of chromium Cr followed by deposition of gold Au. Discontinued circa and replaced by SC Aluminum Al rapidly forms an oxide layer which can be difficult to remove.

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance. For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. The first SEM coater with a ‘cool’ magnetic deflection head.

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When used with the extended height cylinder optional accessory the target to stage height would be an additional 87 mm.

Previous Sputter Coaters and Carbon Coaters | Quorum Technologies

The EMS T ES uses an ‘Intelligent’ recognition system that automatically detects the type of coating insert fitted and “becomes” either an evaporator, carbon coater or sputter coater. It is fitted with gold Au and chromium Cr sputter targets as standard. Available with carbon fibre or carbon rod heads.

Ens be fitted to protect large surfaces in the chamber from coating deposition — easily removable for ease of cleaning. For replacement targets see: View Cart Request a Catalog. Height can be pre-set. This allows the user to configure the system as a spurter coater, evaporator or glow discharge system — all in one space saving format. Also provides rotation drive to the stage.

A factory sms only option for monitoring sheet resistance of evaporated films allowing termination at a known resistance. Please tick if you would like to subscribe to our newsletter.

Supplied with carbon rods 3. The thickness measured on the monitor can be correlated to the thickness sputtee the substrate using a mathematical formula built into the software; this allows the user to control the thickness of material deposited on to the substrate.

Quorum Technologies

Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last coatings carried out and reminders for when maintenance is due. Allows multiple users to input and store coating recipes, with a new rurbo to sort recipes per user according to recent use.

Thermal evaporation of metals from filaments or boats. Including oscillator, feed-through, quartz crystal holder and one quartz crystal.